Features of X-ray diffraction on sapphire single crystals with a nanostructured surface

Abstract

Single-crystal sapphire plates with stepped nanostructures on the surface produced by thermal treatment and with a stochastically distributed surface roughness were studied by X-ray diffraction. It was found that the angular dependencies of intensities and half-widths of the curves of diffraction reflection measured under the Bragg geometry conditions appreciably changed versus the mutual orientation of the direction of propagation of the X-ray beam and the position of the steps, forming nanostructures on the surfaces of sapphire plates.