Abstract
The designs of combining a scanning probe microscope (SPM) with an optical microscope (OM) or scanning electron microscope (SEM) have been presented. To reduce the size of the SPM units the self-sensing probes and a piezo-inertial displacement system are proposed to use. The peculiarities of working of such SPM units are discussed. The examples of visualization of different nature objects in combined systems SPM-OM and SPM-SEM have been presented.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IOP Conference Series: Materials Science and Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
