Features of acoustic wave propagation in the Me/ZnO/Me/diamond waveguide structure.

Abstract

The effect of mass loading on the phase velocities of the surface acoustic wave dispersion modes in the Me/ZnO/Me/diamond piezoelectric layered structure as a function of frequency, metallic, and piezoelectric layer thickness has been investigated. Aluminum, molybdenum, and platinum were considered as the metallic layer materials. It has been demonstrated that the change in the phase velocities substantially depends on the acoustic impedance of the metal layer and its thickness. Results obtained can be useful in the development of controlled acoustoelectronic devices and sensors operating on the Rayleigh and Love waves.