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Abstract
In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT.
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