Feasibility of transparent flexible ultrasonic haptic actuator

Abstract

Ultrasonic haptics actuator is a device that can create a haptic feedback to user’s hand. The modulation of ultrasonic frequency can give different textures to the users. In this study, a feasibility of the ultrasonic haptic actuator made on a flexible piezoelectric substrate is investigated. As the piezoelectric substrate helps to propagate flexural waves, a pair of interdigital transducer (IDT) with reflectors can produce standing waves, which can increase the vibrational displacement of the actuator. A pair of IDT pattern was fabricated on a piezoelectric polymer substrate. A finite element analysis is at first performed to design the actuator. A sinusoidal excitation voltage is applied on IDT electrodes at ultrasonic frequencies and the displacement waveforms are found. The displacement waveforms clearly represent how ultrasonic waves propagate through the piezoelectric substrate.