Abstract
Fe nano-films deposited on pure Si wafer by metal vapor vacuum arc (MEVVA) ion deposition system were annealed in hydrogen and then treated by ammonia at 750 °C for the catalyzed growth of aligned carbon nanotube (CNT) arrays. Influence of ammonia on the microstructures of Fe nano-films was analyzed by a field emission scanning electron microscopy (FESEM) and image analysis software. The microstructures of the post-processed Fe nano-films were found depending on the processing time of ammonia and the film thickness. Comparing the growth results of CNTs from 10 nm Fe films, we found that when the processing temperature was 750 °C, the optimum processing time of ammonia was about 10 to 12 min for 10 nm Fe films to catalyze the growth of aligned CNT arrays.
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