Abstract
This paper presents a SOI Hall sensor based microsystem for energy measurement. The mixed-mode signal circuitry has been entirely designed and integrated in the experimental 0.5μm fully depleted SOI 3V technology. It consists of an integrated Hall element, chopper stabilized sensor bias system, analog front end and digital back end. Aiming at performing accurate measurements, we have implemented a high linearity analog front end, as well as a high-resolution analog-to-digital conversion technique. Two versions of the microsystem have been realized. The first test chip contains a classical instrumentation amplifier as sensor amplifier, whereas the second one contains a linearized differential-difference amplifier as sensor amplifier. Both microsystems are fully functional and permits one to perform the measurements with an overall system error that is less than ±1.5%.
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