Abstract
Thin titanium films deposited on aluminum, in a multilayered form, were found to transform from a hexagonal close-packed (hcp, P63/MMC) structure to the face-centered cubic structure (fcc, FM3M) upon thinning of cross sections for TEM study. The transformation results in twinned Al and Ti layers with noncoherent Σ = 3 boundaries separating the twin related crystals in each layer. The as-deposited Ti is hcp and the Al fcc. The Ti layers studied varied in thickness between 30 and 500 nm. They were deposited by electron beam evaporation in vacuum, using 30 nm thick layers of Al to form multilayered films which contained between 10 and 100 bilayers. The study was conducted by TEM and X-ray diffraction and the hcp to fcc transformation of the Ti layers was observed in all the multilayers.
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