Abstract
Up to date ULSI devices are triggering incredible challenges for End User Failure Analyst. Laser Stimulation (LS) techniques is one of the most adapted to face them. Static Laser Stimulation (SLS), with an appropriate choice of wavelength, has been widely use for leakage localization. More recently, Dynamic Laser Stimulation (DLS) has been applied to localize soft defects. It has been completed by Variation Mapping techniques (xVM). Today, Dynamic Laser Stimulation Extended testing, based on multi xVM and Full Dynamic Laser Stimulation (FDLS) open a wider range of applications for failure analysis and reliability purpose.
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