Abstract
Conventional compliant micropositioning stages are usually developed based on static strength and deterministic methods, which may lead to either unsafe or excessive designs. This paper presents a fatigue reliability analysis and optimal design of a three-degree-of-freedom (3 DOF) flexure-based micropositioning stage. Kinematic, modal, static, and fatigue stress modelling of the stage were conducted using the finite element method. The maximum equivalent fatigue stress in the hinges was derived using sequential quadratic programming. The fatigue strength of the hinges was obtained by considering various influencing factors. On this basis, the fatigue reliability of the hinges was analysed using the stress-strength interference method. Fatigue-reliability-based optimal design of the stage was then conducted using the genetic algorithm and MATLAB. To make fatigue life testing easier, a 1 DOF stage was then optimized and manufactured. Experimental results demonstrate the validity of the approach.
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