Abstract
Abstract Polysilicon fracture mechanics specimens have been fabricated using standard MEMS (microelectromechanical systems) processing techniques, and as a result, have characteristic dimensions comparable to typical MEMS devices. These specimens are fully integrated with simultaneously fabricated electrostatic actuators which are capable of providing sufficient force to ensure catastrophic crack propagation from notches produced using micromachining. Thus, the entire fracture experiment takes place on-chip, without any possible influences from external sources. Fracture has been initiated using both monotonic and cyclic resonance loading. A typical device is shown in the figure below. This talk will review the (1) design of the experiment, (2) fabrication procedure, (3) measurements of bending strength, critical energy release rate, and fatigue life under cyclic loading, and (4) changes being incorporated in the structural design to make the testing procedure more robust.
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