Abstract

This chapter describes a fast and high-space resolution three-dimensional (3-D) shape inspection system based on the light-section method, which sets a multi-sided mirror between an image sensor and the target object being measured. Assuming that planar objects are being measured, the 3-D shape measurement system can enhance the width of the measurement area in a sideward direction by introducing a spatial transform of the measurement area using a multi-sided mirror. The mirror divides the image area of h × v pixels into n areas of \(h^{\prime} \times v\) pixels (\(h = nh^{\prime}\)) and lines up these areas in a sideward direction. Thus, it is possible to achieve a wider range of \(h^{\prime} \times v^{\prime}\) pixels (\(v^{\prime} = nv\)) and accurate 3-D shape measurements in a sideward direction. A prototype system was developed for real-time 3-D shape measurement based on high-speed vision hardware that could process a 1024 × 1024 image at 1000 fps. To accelerate the 3-D profile calculations, a hardware circuit logic for the light-section method was implemented using eight-divided image areas of 128 × 1024 pixels on a field-programmable gate array (FPGA) device in the high-speed vision hardware, which allowed a 3-D profile with 8192 points to be outputted in real time. The performance was verified by measuring 3-D shape information for a 94 mm × 147 mm printed circuit board for a mobile phone.

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