Abstract
The authors present a laser-assisted nanotransfer printing technique for transferring metal nanopatterns onto prepatterned substrates. A fused quartz mold covered with an array of chromium nanodots is pressed against the surface of a photolithographically patterned substrate, while a single laser pulse from a quadrupled-frequency solid state Nd:YAG laser is used to melt the thin metal structures. By controlling the laser fluence, selective metal pattern transfer can be realized only on the protruded area of the substrate upon separation of the quartz support. The transferred chromium nanodots are then used as an etch mask to pattern three-dimensional structures.
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