Abstract
In this communication, we describe a fast thickness profilemeasurement method for a transparent film, thinner than thewhite-light coherence length of 3-4 µm that is deposited onpattern structures. A visible acousto-optic tunable filter isemployed for real-time wavelength scanning and the three-dimensionalvolumetric thin-film thickness profile information is obtained usinga simple peak detection method in the spectral domain. The key ideais to divide the measurement into two states using a beam blockingmechanism to separately obtain the two unknowns of thickness andsurface profile. Such separate measurements are required tocompensate for the phase change effect caused by the multi-reflectedbeams from the thin film. The final thin-film surface profileinformation is measured by obtaining the number of peaks and phasedeviations from the two separately scanned spectral intensity values.
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