Abstract
The characteristics of generalized Green’s function elements with different materials and cuts are analyzed. The real part has only one zero crossing point that corresponds to a free surface acoustic wave (SAW) when the imaginary part of elements H33 is zero. Moreover, the signs of the real part on two sides of the zero crossing point are opposite. A fast SAW solution algorithm is developed on the basis of the characteristics of H33. Free surface SAW velocity vf is obtained by searching the zero crossing point of H33, and metal surface SAW velocity vm is obtained by searching the zero crossing point of an effective permittivity that is smaller than vf. A numerical simulation is performed. Results show that the obtained SAW velocity and electromechanical coupling coefficients are consistent with the reported results. Moreover, the calculation time of the proposed SAW solution method is approximately 10% of the existing methods, which verify its feasibility.
Highlights
A surface acoustic wave (SAW) is a mechanical wave that propagates on the surface of a medium
The performance of a SAW device depends on the material type and cut angle of a piezoelectric substrate regardless if it is used as a frequency control device or a sensitive element
The corresponding velocity of the zero crossing point coincides with the free surface SAW velocity. This condition provides a new means of designing a fast SAW solution method
Summary
A surface acoustic wave (SAW) is a mechanical wave that propagates on the surface of a medium. SAW devices are used in temperature, pressure, torque, PM2.5, and influenza virus detection.[4,5,6,7] The performance of a SAW device depends on the material type and cut angle of a piezoelectric substrate regardless if it is used as a frequency control device or a sensitive element. A fast SAW solution method must be developed to improve the design process of SAW devices. The corresponding velocity of the zero crossing point coincides with the free surface SAW velocity. This condition provides a new means of designing a fast SAW solution method. The present study designs a fast SAW solution method based on Green’s function
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