Fast-Response Electrostatic Actuator Based on Nano-Gap

Edward Kostsov,Alexei Sokolov

doi:10.3390/mi8030078

Abstract

The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented.

Highlights

A number of applications need actuators to be of small size, to develop large forces on a scale of less than a millisecond—for example, devices for fuel injection—to have “needleless” syringes and so on
We proposed a new mechanism of electromechanical energy conversion [12–16] that can considerably improve the actuator energy density As up to 1–10 J/m2
The analysis has shown that the described electromechanical energy conversion can be used to design high-energy-output electromechanical fast-acting drives

Summary

Introduction

A number of applications need actuators to be of small size, to develop large forces on a scale of less than a millisecond—for example, devices for fuel injection—to have “needleless” syringes and so on. MEMS actuators (EA) achieve only small forces because the electric field (E) in the gap is not high enough. Even though modern MEMS that are based on 2–3 μm air gaps have a high enough operating speed, they do not have sufficient energy density (it is less than 0.01 J/m2 ) and cannot produce force that is more than 10 μN. They cannot achieve a sufficient stroke for the moving element of the construction; this stroke is limited to 3–5 μm. A new mechanism of electromechanical energy conversion that can be used for high energy density actuators capable of producing high mechanical forces in a short time is considered

Operation Principle of the Fast-Response Electrostatic Actuator

Electrostatic Drive Operation

This force is within range

Experimental

Waveforms

Conclusions