Abstract

Ferroelectric field-effect transistors (FeFETs) based on HfO<sub>2</sub> are promising for low-power and high-speed non-volatile memory devices. However, most reported FeFETs show limited write endurance and significant read-after-write delay due to parasitic charge trapping. Here we show that n-type FeFETs with SiN<sub><i>x</i></sub> interfacial layer and high write endurance also exhibit immediate read-after-write behavior due to negligible charge trapping. This overcomes one of the major challenges faced by FeFET technologies today.

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