Abstract
An extremely fast pump-down aluminum ultrahigh vacuum system has been developed, with an evacuation time of less than 5 min from atmosphere to pressures in the 10−9 Torr range. Key elements of the system are: (1) a moisture trap (three-stage sintered metal filter) to produce super-dry nitrogen gas, with a water content of about 10 parts per billion, and (2) a cryogenic aluminum alloy panel. A 50 ℓ/s turbomolecular pump is initially used to evacuate the chamber, followed by a 300 ℓ/s turbomolecular pump as the main pump, which immediately operates with normal its full speed. The system can be vented to atmospheric pressure, with the use of super-dry nitrogen gas at a flow rate of 10 ℓ/min, without degradation of the fast pump-down time.
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