Fast prototyping of monolithicmicro-system on epi-fluorescent microscopes

Abstract

Here we demonstrate the fabrication of monolithic micro-systems with controlled 3D internal geometry and embedded 3D microstructures using a mask-less micro projection lithography technique designed to coexist on routine epi-fluorescence microscopes. The concept is compatible with fast prototyping of conceptual designs requiring few manufacturing steps, and a versatile and economic mask-less fabrication of 3D microstructures. The technology is capable of more than 10:1 aspect ratios and a resolution of ∼5 μm, while by c hanging microscope objectives the microstructures can be integrated in a up to 10 mm size service structures.