Abstract
We have fabricated a thin-film optical detector for detecting short optical pulses propagating in channel waveguides. The detectors show response times of 200 ps full width at half maximum amplitude when illuminated by guided, subpicosecond optical pulses. The detectors are formed by depositing hydrogenated amorphous silicon (a-Si:H) directly on the dielectric channel waveguides. Back-to-back Schottky photodiodes are then formed when interdigitated chrome-gold metal contacts are deposited on the a-Si:H.
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