Abstract
An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products.
Highlights
The supply and demand of liquid crystal display (LCD) panels has increased in the last decade with the rapid development of display technology, along with the use of smart phones, notebooks, and LCD TVs
These two spectral domain optical coherence tomography (SD-Optical coherence tomography (OCT)) systems are considered as spectral domain (SD)-OCT-1 and SD-OCT-2, with sample scanning head 1 and sample scanning head 2, respectively
Thepurpose optical thin multiple varying thickness thickness as defects shown in figure
Summary
The supply and demand of liquid crystal display (LCD) panels has increased in the last decade with the rapid development of display technology, along with the use of smart phones, notebooks, and LCD TVs. Fast, reliable and efficient LCD inspection equipment is essential for the current manufacturing industry. Reliable inspection equipment can detect and analyze defects and possible causes in the fabrication process, minimize production-line stoppages, and ensure customer satisfaction by increasing LCD reliability. Background noise is removed by subtracting the acquired signal from the removed by subtracting the acquired signal from the reference signal. Full-range k-domain linearization is used to remove the non-linearity in the raw is used[40,41]. To remove non-linearity in thelinearization raw signal [40,41]. Thethe full-range k-domain is employed in both spectrometers to remove employed in both spectrometers to remove the nonlinearity in axial direction. The filtered spectrum with a narrow linewidth (~0.5 nm) is with a narrow nm) The is detected to thescanning line-scan filter camera
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