Abstract
Abstract The state-of-the art lifetime measurement technique MDP (microwave detected photoconductivity) is presented with its latest developments in sensitivity, measurement speed and data simulation. Several applications and examples in the field of inline material characterization, defect recognition and real time statistical process control in silicon bricks and wafers are presented, demonstrating the practical use of MDP measurements and of the data obtained by it. The measured lifetime itself combined with its spatial distribution and the measured steady state photoconductivity enable a good correlation to the cell efficiency. Furthermore, the paper presents a detailed summary of the properties of steady state and non-steady state microwave based minority carrier lifetime measurement techniques to complete this extensive study.
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