Fast Finite Element Modeling Method for TSV Interposer on Specially Developed SAAS Cloud

Abstract

The coupled thermo-mechanical field analysis of TSV interposer is a typical multiscale simulation problem, it faces great difficulty of numerous TSVs and complex micro structures. To get balance between accuracy and efficiency, global/local finite element (GLFE) strategy often be used in the multiscale coupled field analysis. In steps of the GLFE strategy, global coarse mesh evaluation plays the key role and the mesh model of this step determines the calculation effect. Currently, finite element modeling for TSV interposer is mostly finished manually with the help of comprehensive finite element software. To improve the laboriously and time-consuming manual modeling procedures, a finite element modeling method specifically oriented for TSV interposer is proposed. The modeling method is an imitation of fabrication procedures, it consists of layer based geometry modeling, parametric meshing, automatic contact detection, automatic boundary condition building and automatic loading processes. TSV discretization methods affected the quality of the mesh model directly, 4 kinds of TSV discretization methods are proposed in this paper, namely: Fine Mesh Method, Single Point Method, Single Mesh Method and Equivalent Model Method, they reach different equilibrium points on model size and accuracy, feeding need of different simulation scenarios. As the implementation of the modeling method a SAAS cloud system is built, the system run in B/S mode and it can make the modeling procedures easier. Finally, with the help of the modeling method and the SAAS cloud system, a thermo-mechanical analysis of TSV interposer based 2.5D RF module is done. The comparison of the time consumption and results with comprehensive finite element software ANSYS Workbench indicates that the cloud system can get great efficiency with enough accuracy.