Abstract
ArF excimer laser ablation is used for the periodic patterning of glass surfaces. Projection of phase gratings provides the parallel generation of high resolution line patterns with structure periods in the µm-range. A fast and efficient process is possible, if laser pulse repetition and work piece motion are synchronized, so that multiple pulses can be applied to each work piece position, while continuously moving the work piece. A writing speed of 0.1 cm2/s is demonstrated and the scalability to 1 cm2/s is presented. Sub-micron periods are obtained by using Schwarzschild objectives. The process is applied for high contrast diffractive marking of glass.
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