Abstract
Results are given on the continuous measuring of the mass thickness of thin metal and dielectric films over a large thickness range by coating experiments with a 4.96 MHz fundamental-mode AT-cut quartz-crystal resonator. The electronic circuit and the construction of a suitable crystal holder with low damping and for reduction of the temperature influence on the quartz frequency is discussed. Also information is given on the mass sensitivity depending on previous mass charges of the quartz crystal obtained in a special arrangement.
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