Facile synthesis of size- and shape-controlled freestanding Au nanohole arrays by sputter deposition using anodic porous alumina templates

Abstract

To fabricate a freestanding through-hole Au membrane using an anodic porous alumina template, Au was deposited on the outermost surface of an anodic film followed by the removal of the template. Alumina templates with different dimensions (e.g. diameters and number of pores) were prepared by two-step anodization in the range of 40–80 V and pore-widening. The Au thin films were deposited onto alumina templates with well-controlled surface morphologies by sputter deposition using a commercially available ion sputter coater. After the removal of the alumina template, a variety of Au membranes with nanoholes, nanotubes, or branched pores were obtained, which reflect the morphology of the alumina template. When the sputtered Au penetrates the pores of the alumina film, Au nanotube arrays with an aspect ratio of ∼3 can be fabricated. The present method is much simpler than the traditional template process involving multi-step replication because there is no need to separate the alumina template from the aluminum substrate before Au deposition.