Abstract
In recent years, transition metal dichalcogenides (TMDs) have been widely used for gas sensors. Here, three-dimensional (3D) WSe2 nanosheet arrays were surface treated by microwave plasma. Based on the original 3D structure, a 1T/2H hybrid phase structure was constructed by phase modulation, and Se vacancies were introduced to effectively improve its gas sensing performance. After only 60 s of treatment, the response (52.24 %), response/recovery time of the sample for 1 ppm NO2 were significantly improved with excellent stability and selectivity at room temperature. The intrinsic mechanism of its performance enhancement was elicited through various characterizations and molecular model construction. It is demonstrated that microwave plasma is a promising treatment method to improve the gas-sensitive performance of TMDs.
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