Faceting of Stepped Silicon (113) Surfaces: Step Unbinding, Dynamic Scaling, and Nano-Scale Grooves

Abstract

AbstractX-ray scattering studies are reviewed of the faceting kinetics of stepped silicon (113) surfaces misoriented towards [001]. Following a quench from the one-phase region of the orientational phase diagram into the coexistence region, initially-uniformly-distributed steps rearrange to form a grooved superstructure. Our measurements reveal the behavior of the grooved surface morphology as a function of time. The surface is found to be self-similar in time, with a characteristic groove size (L) varying as a power-law versus time (t): L = L0tøwith a coarsening exponent of ø = 0.164 ± 0.021 ≃ 1/6, consistent with a theory for the kinetics of faceting which focuses on thermally fluctuating step bunches and their collisions. At later times, the groove size approaches a limiting value which depends on the stepped phase misorientation angle, as expected for faceted surfaces in the case that elastic effects are important.