Abstract
Multilayer coatings, such as Antireflection (AR) & High Reflection (HR), are used respectively in front & back facet coatings of diode laser for high power and long life operation. In this paper, we coated single layer AR coating using Al 2 O 3 MgF 2 and multilayer HR coating using Al 2 O 3 and MgF 2 as a low refractive index layer and Si as high refractive index layer on GaAs substrates for optimization of coating conditions and HR coating using Al 2 O 3 \Si and MgF 2 \Si on diode laser chips. AR coating of diode laser is planned.
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