Abstract
In this paper we describe the technological and fabrication methods necessary toincorporate both photonic and electronic-band engineering in order to create novelsurface-emitting quantum cascade microcavity laser sources. This technology offers thepromise of several innovative applications such as the miniaturization of QC lasers, andmulti-wavelength two-dimensional laser arrays for spectroscopy, gas-sensing and imaging.This approach is not limited to light-emitting devices, and may be efficientlyapplied to the development of mid- and far-infrared normal-incidence detectors.
Highlights
The recent demonstration of laser action in a photonic-crystal quantum cascade (PC QC) laser [1] proved that photonicand electronic-band engineering can be successfully combined to add new functionalities to devices based on intersubband transitions [2,3,4]
The essential requirements we need to satisfy in order to fabricate a functional device are the localization of current injection into the PC QC devices, and the absence of metal deposition onto the holes’ sidewalls
Do not overlap the gain spectrum (figure 9(a)), the emission is near-Lorentzian with a full-width at half-maximum (FWHM) of ∼100 cm−1 centred at the QC heterostructure design wavelength
Summary
The recent demonstration of laser action in a photonic-crystal quantum cascade (PC QC) laser [1] proved that photonicand electronic-band engineering can be successfully combined to add new functionalities to devices based on intersubband transitions [2,3,4]. The core idea is the use of a high-index contrast planar two-dimensional (2D) photonic crystal that can act as the resonator providing feedback necessary for lasing, and at the same time can diffract light vertically up from the surface of the semiconductor chip. In particular the size reduction, compared to standard QC technology, opens the way to the miniaturization and on-chip integration of intersubband devices for a broad range of applications. Novel processing recipes and procedures were necessarily developed to demonstrate the first functional PC QC microcavity laser. The purpose of this paper is to report the fabrication technology to the scientific community
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