Abstract
In This work, the design, manufacture and implementation of new attached equipment to the physical vapor deposition system was reported. Using this system ZnS films were prepared under glancing angle deposition (GLAD) technique with the help of varying polar and azimuthal angles of substrate simultaneously without vacuum drop during deposition process. In addition, the designed system will help to control substrate temperature which makes the growth of sculpture thin films possible. The whole system is controlled by a programmable microcontroller. The formation of ZnS zigzag sculptured nanostructured thin films was confirmed by Field Emission Scanning Electron Microscopy (FESEM) and Atomic Force Microscopy (AFM) analyses.
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