Fabrication of ZnO thin films using charged liquid cluster beam technique

Abstract

A thin-film deposition technique utilizing a charged liquid cluster beam was applied in the fabrication of ZnO thin films on silicon substrates with a thin layer of native oxide. The liquid precursor was prepared by dissolving Zn-trifluoroacetate in methanol. The film was very uniform, densely packed, and predominantly c-axis oriented. The initially resistive ZnO thin film became conductive after annealing in a hydrogen atmosphere for 5 min. The electrical resistivities of the annealed films ranged from 7.99×10−3 to 1.60×10−2 Ω cm. The electron carrier concentrations were in the range of 3.33–5.35×1019 cm−3 and the mobilities were 7.30–19.07 cm2 V−1 s−1. The refractive index varied from 1.89 to 1.96 as the growth temperature increased from 340 to 440 °C.