Abstract
A ZnO-based film bulk acoustic resonator (FBAR) with a W/SiO2 multilayer reflector has been fabricated using a two-step ZnO deposition. The FBAR showed a large return loss of 35 dB at ~2 GHz and a high quality factor (high-Q) of ~4000. The resonance characteristics depended largely on the multilayer reflector and ZnO film.
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