Abstract
The fabrication process of all-oxide layered structures of YBCO/PBCO/SrTiO3/PBCO/YBCO on MgO(100) substrates for superconductor-insulator-superconductor (SIS) tunnel junctions was investigated by in situ rf magnetron sputtering. Fully c-axis-oriented structure was obtained by varying the sputtering conditions. The optimized structure had a well-defined interface at each boundary between layers. A planar junction was fabricated by the atomic milling technique, and Josephson supercurrent and microwave response were observed. Moreover, a structure resembling an energy gap was found by differential resistance measurement.
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