Fabrication of YBCO superconducting dual mode resonator for satellite communication

Abstract

Superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films have been grown epitaxially on (100) MgO substrates of laser ablation technique. Superconducting properties of YBCO thin films on MgO substrates have been investigated by X-ray diffraction pattern, scanning electron microscope, transport and magnetized T/sub c/ measurements. Superconducting dual mode disk resonators were designed by microwave design software, EEsof and fabricated by photolithography and wet-etch process using YBa/sub 2/Cu/sub 3/O/sub 7-x/, superconducting thin films with T/sub c/ of 87 K. The unloaded quality factor of the superconducting dual mode disk resonator was measured to be 1312 at 77 K by a HP8510B vector network analyzer. A clear resonant frequency splitting in the frequency range of 7.7-9.7 GHz was observed in a perturbed dual mode disk resonator. This type of dual mode disk resonator could be utilized as a dual mode resonator filter for satellite communication. >