Abstract

VO2 thin films were obtained from V2O5 thin film in the thermal decompose process. V2O5 thin films were prepared in the spin-coating way and with V2O5 sol-gels as raw materials fabricated by the reformative inorganic sol-gel method. The effects of the viscosity of colloid on the fabrication of V2O5 film and the thermal decomposing temperature on the fabrication of VO2 film were studied. The results show that the appropriate viscosity of colloid to obtain well-distributed V2O5 film was in the range of 30g/L-40g/L and suitable thermal decomposing temperature was about 500°C.

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