Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation

Abstract

The fabrication of parallel deep nanogrooves on 6H-SiC by femtosecond laser ablation (λ=785 nm) is reported. The periodicity of the nanogrooves was measured to be about 200±20 nm and the depth exceeded 15 μm. The nanogrooves have high uniformity in size and pattern over the entire depth. Laser fluence is found to be the critical parameter to obtain these deep and regular nanogrooves. The feasibility for large area fabrication of nanogrooves by femtosecond laser ablation is demonstrated.