Fabrication of ultrathin and highly flexible InP-based membranes for microoptoelectromechanical systems at 1.55 /spl mu/m

Abstract

Tunable microcavities have been fabricated to evaluate their tunability in dependence on the membrane thickness. The membrane thickness has been decreased from 615 nm down to a record thickness of 123 nm yielding in a maximum mechanical tunability of 15.15 nm/V <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . Furthermore, a three-period /spl lambda//4 InP/air-gap high reflective mirror (R > 99.8% at 1.55 μm) with a record wide stopband of more than 1100 nm has been fabricated. These results are achieved thanks to specific metal-organic vapor-phase epitaxy growth parameters.