Abstract
In this paper we propose a novel method for the realization of carbon nanotube field-effect sensors (CNTFESs) which will most likely have a strong impact on the next-generation of sensors. CNTFESs are ideally suitable for biomedical sensor applications due to their excellent inherent properties such as ultra small size, high specific surface area and extremely high sensitivity. CNTFESs are based on carbon nanotube field-effect transistors (CNTFETs) which are optimized for sensor applications. We have succeeded to develop a simple, reproducible fabrication process to grow individual single-walled carbon nanotubes (SWNTs) and SWNT-networks directly within the specified device area. No tedious manual manipulation and alignment of the SWNTs is necessary. Electrical results of the fabricated fully functional CNTFETs are presented and the use of these devices as SWNT-based field-effect controlled sensors for virus detection is discussed.
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