Abstract
Two-dimensional photonic crystals (PhCs) were etched into InP/(Ga,In)(As,P) planar waveguides using chlorine-based chemical assisted ion beam etching (CAIBE). The processed PhCs were optically characterized by measuring transmission through simple slabs and one-dimensional cavities. The optical performances inside the photonic band gap are much better compared to both previously reported CAIBE results and results obtained with other etching methods. In particular, we measured a record quality factor of 310 for one-dimensional cavities fabricated in this material system.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.