Abstract

In this work an aluminum zinc oxide nanostructure thin film was deposited on polycarbonate polymer substrates using a magnetron sputtering technique. X-ray diffraction, field emission scanning electron microscopy and X-ray photoelectron spectroscopy methods were used to investigate the structure, morphology and surface composition of the thin film. The transmittance and reflectance of the aluminum zinc oxide thin film was investigated by a UV-VIS-NIR spectrophotometer. The sheet resistance of the aluminum zinc oxide thin film was measured by the four point probe method. The average reflectance in the near infrared region and the sheet resistance of the aluminum zinc oxide thin film were 30% and 105 Ω/sq, which encourages the heat mirror of the aluminum zinc oxide thin film.

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