Abstract
Rapid breakdown anodization (RBA) process was used to fabricate TiO2 sensor to measure pressure and humidity and sense gases at room temperature. This chemical process transformed Ti to its oxide (TiO2) as a powder with amorphous phase as X ray diffraction (XRD) technique confirmed. This oxide consisted from semi spherical nanoparticles and titania nanotubes (TNTs) as Scanning electron microscope (SEM) technique showed. TiO2 powder was deposited on Ti substrates by using electrophoretic deposition (EPD) method. Average pressure sensitivity was 0.34 MΩ/bar and hysteresis area was 1.4 MΩ .bar. Resistance of TiO2 decreased exponentially with the increasing of relative humidity (RH%). The sensitivity% of TiO2 for RH% was greater than 70% in the range of (50-95). TiO2 was tested as a sensor for Ammonia, Ethanol and Methanol. Its sensitivity and selectivity towards Ammonia were the greatest but the shortest response and recovery times were recorded toward Methanol.
Highlights
Nano structured metal oxide semiconductor sensors had better sensing response due to its small size and increased surface-to-volume ratio [1]
One of the limitations of titania nanotubes (TNTs) by this technique is its sticking on titanium substrate
Obtaining TNTs in perchloric acid solution by anodization process was reported by many groups [6,7,8]
Summary
Nano structured metal oxide semiconductor sensors had better sensing response due to its small size and increased surface-to-volume ratio [1]. An attempt was introduced to fabricate single pressure, humidity and gas sensor by using produced TiO2 powders by RBA process. Figure-1 shows XRD patterns of as prepared TiO2 powder before and after the annealing process at 6000C for 2 hours. Figure-2 shows AFM images and granularity cumulating distribution chart on the surface of as deposited TiO2 .
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