Abstract
AbstractThis paper presents a new fabrication process for producing magnetic microcomponents. The process is based on micro powder injection moulding technology, while the micro moulds are produced using microelectromechanical systems (MEMS) technology. The process involves (1) fabrication of polydimethylsiloxane (PDMS) micro moulds from SU-8 masters, which are produced using UV photolithography process; (2) mould filling with magnetic powder and demoulding; and (3) sintering of moulded components in vacuum. The proposed process has been used to sinter Nd-Fe-B microcomponents successfully without using binder system. This research proposes a new approach to fabricate 3-D magnetic microcomponents to meet the needs in applications where magnetic field required.KeywordsBinder SystemMould FillingMaster MouldIsostatic PressureMagnetic PowderThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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