Fabrication of Three-Dimensional Micro Optical Device

Abstract

By use of localized modification of transparent materials with femtosecond laser pulses the fabrication of three-dimensional photonic device was become possible. In this paper, we report on the fabrication technique of three-dimensional optical devices. We show that the waveguides and the couplers can be fabricated by use of the filamentation of femtosecond laser pulses. We report on the formation and the movement of submicrometer vacancies, called voids and also the formation of three-dimensional shapes of long holes with microscopic diameters. Finally we show the formation of Bragg gratings in soda-lime glass by two-beam interference.