Fabrication of Thin-Film Transistor Integrated Circuits on Flexible Substrate by Transfer Technique of Carbon Nanotube Network Using Poly(vinyl alcohol)

Abstract

Flexible integrated circuits consisting of carbon nanotube thin-film transistors (CNTTFTs) were fabricated on a poly(ethylene naphthalate) (PEN) substrate by the transfer technique of the CNT network. The CNT network grown on a SiO2/p+-Si substrate by plasma-enhanced chemical vapor deposition was transferred onto the PEN substrate using poly(vinyl alcohol) (PVA). A delay time of 1.1 µs/gate was realized for the ring oscillator with a channel length of 10 µm. The present delay time is the best ever reported to our knowledge among CNTTFT flexible integrated circuits using transferred or printed CNT networks.