Fabrication of thin film electrode material by pulsed laser deposition

Abstract

The substrate dependent electrochemical properties of SrLi2Ti6O14 thin films were studied for Li-ion micro batteries. Thin films were deposited on polished and unpolished stainless-steel substrates by pulsed laser deposition (PLD). The deposition parameters such as laser density, substrate temperature etc. were optimized systematically and the best conditions were chosen for this study. X-ray diffraction confirmed the phase pure crystallinity of deposited thin films. Surface morphology studies were done by field emission scanning electron microscope. The substrate effect was observed for grain growth and orientation of deposited phase. The galvanostatic charge/discharge tests revealed that the films deposited on polished substrates exhibited higher capacity (140 mAh g−1) with good retention of 90% compared to unpolished substrates (95 mAh g−1). Deposition and electrochemical aspects of SrLi2Ti6O14 thin film micro-batteries have been elaborated.