Abstract
In this work, a high sensitivity micro-thermal conductivity detector (μTCD) with four thermal conductivity cells was proposed. Compared with conventional TCD sensors, the thermal conductivity cell in this work was designed as a streamlined structure; the thermistors were supported by a strong cantilever beam and suspended in the center of the thermal conductivity cell, which was able to greatly reduce the dead volume of the thermal conductivity cell and the heat loss of the substrate, improving the detection sensitivity. The experimental results demonstrated that the μTCD shows good stability and high sensitivity, which could rapidly detect light gases with a detection limit of 10 ppm and a quantitative repeatability of less than 1.1%.
Highlights
The gas monitoring system of transformer oil is very important to the ensure safe operation of power transformers [1,2,3]
In this work,Setup a portable gas chromatography system integrated with a GC column and μTCD was proposed
A portable gas chromatography system integrated with a GC column and μTCD was proposed for monitoring small molecular gas
Summary
The gas monitoring system of transformer oil is very important to the ensure safe operation of power transformers [1,2,3]. Narayanan designed a four-cell μTCD, but the thermistors adopted a non-suspension structure with large thermal loss, reducing the sensitivity of the detector [10]. In order to improve the sensitivity of TCD, a high sensitivity μTCD with four-cell based on MEMS is the air flow channel, presenting a streamlined. Thicker thermal conductivity cell has no obvious deadthe volume, greatly improving the sensitivity of the low-stressthe silicon. If only pure carrier gas is transported into the channels at the same time, bridge is the bridge is balanced because the resistance values of these thermistors are the same. The principle of μTCD a concentration detector that responds to the difference in thermal conductivity conductivity between theistested component and carrier gas. The results show that the sensitivity of the sensor can be improved by increasing the proportion of Q1 [16]
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