Abstract

An ultrasonic vibration-assisted indentation system/method is proposed and developed to fabricate structured or textured surfaces more precisely and efficiently than the conventional micro-cutting process. Indenters made of single crystalline diamond (SCD) were fabricated by laser fabrication and polishing with diamond abrasives on a cast iron plate. In the experiments, the microarray molds of four-corner cone and semi-sphere shapes were generated precisely on the electroless Ni-P substrate with ultrasonic vibration-assisted indentation using the SCD indenters. From the indentation experiments, it is clear that the microtextured patterns were formed precisely and effectively by using the developed indentation system.

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