Abstract
A patterned laser lift-off technique is adopted for fabricating terahertz (THz) metamaterials with micrometer precision. A shaped UV laser pulse is used to remove low-viscosity silver nanopaste from a quartz substrate. Various types of metal THz metamaterials, including gradient metamaterials, can be obtained flexibly by movement of the sample and programming of the shaped beam. Two THz metamaterials, which are based on bridged double split ring resonator and its complementary resonator, respectively, are fabricated and tested. The results show that patterned laser lift-off based on a low-viscosity silver nanopaste film can supply a low-cost and easy-operation route in the fabrication of various THz metamaterials.
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