Fabrication of surface: relief gratings and their laser induced damage resistance properties

Abstract

This work demonstrates a promising method for fabricating ZrO2 surface–relief gratings by photosensitive sol–gel method combining with two-beam laser interference. UV-photosensitive ZrO2 resist with high resolution are prepared by using metal–chelate complexes as precursors. Two-beam laser interference lithography is carried out by a Kr ion laser with a wavelength of 350.7 nm and ZrO2 gratings with the minimum line-width of 150 nm are obtained. Laser induced damage resistance properties of ZrO2 gratings are investigated by a Q-switched solid state laser with the wavelength of 527 nm and the pulse width of 8.65 ns as the incident source. The results show that the LIDT of ZrO2 gratings on glass substrate heated at 600 °C is about 4.59 ± 0.06 J/cm2.